The KYKY CXF1401(CF/LF) magnetic bearing for turbomolecular pumps utilizes advanced active magnetic levitation technology, designed for ultra-high vacuum environments with contact-free operation and extended service life, ideal for semiconductor and scientific research applications.
This technical report details the features, specifications, and applications of KYKY CXF1401 magnetic bearings for turbomolecular pumps, including 10 expert Q&As for maintenance professionals in high-tech vacuum systems.
Parameter |
Specification |
Technical Advantage |
Compatibility |
KYKY CXF1401(CF/LF) TMP |
OEM precision fit |
Bearing Type |
Active Magnetic Bearing |
Completely contact-free |
Speed Range |
0-90,000 RPM |
Ultra-high speed stability |
Ultimate Vacuum |
≤5×10⁻⁹ Pa |
UHV environment suitable |
Axial Stiffness |
>200 N/μm |
Exceptional stability |
Control System |
5-DOF active control |
Real-time dynamic balancing |
Service Life |
>100,000 hours |
Extended operational life |
Material Tech |
Special alloy + ceramic coating |
High-temp & corrosion resistant |
At global semiconductor leader:
✔ Increased MTBF to 15,000 hours
✔ Improved wafer yield by 0.8%
✔ $600K annual maintenance reduction
Performance in national lab:
✔ 3 years continuous operation
✔ Sustained 3×10⁻⁹ Pa vacuum
✔ Passed 2,000 start-stop cycles
A: Completely contact-free operation eliminates mechanical wear, extending life 10x+.
A: Backup power + auxiliary mechanical bearings ensure safe shutdown.
A: Absolutely lubrication-free, preventing vacuum contamination.
A: Built-in vibration sensors monitor all 5 degrees of freedom in real-time.
A: <0.1g·mm/kg, with precision dynamic balancing before shipment.
A: OEM engineer calibration available (advance appointment required).
A: Integrated temperature compensation maintains stability from -10°C to 60°C.
A: 36 months or 30,000 hours (whichever comes first).
A: Complies with SEMI S2, CE, RoHS standards.
A: Standard models 1pc, custom solutions 50pc MOQ.