In modern industrial and scientific research fields, the demand for high - precision measuring equipment is growing steadily. The diaphragm capacitance vacuum gauge RBM350, with its excellent performance and wide applicability, is gradually becoming a key device in many high - performance application scenarios.
Deeply understand the diaphragm capacitance vacuum gauge RBM350 suitable for high - performance applications, including its technical specifications, product advantages, diverse application fields, practical cases, and answers to common questions, and comprehensively recognize this high - precision measuring tool.
This article comprehensively introduces the diaphragm capacitance vacuum gauge RBM350, elaborates on its technical specifications such as measurement range and accuracy, emphasizes advantages like high - precision, fast - stabilization, and quick - recovery, shares application cases covering scientific research, industry, medical, and other fields, introduces usage scenarios and precautions, and answers common questions to help readers fully master the product.
With an accuracy class of 0.25, it has a low reading error within different measurement ranges. When ≥133Pa, the error is 0.2%, and when ≤133Pa, the error is 0.5%, ensuring the accuracy of measurement data.
It can quickly stabilize after the power is turned on and can also quickly recover after being exposed to atmospheric pressure, reducing waiting time and improving work efficiency.
It has excellent long - term signal stability, with a zero drift of only 0.005% F.S./℃ and a full - scale drift of 0.04% F.S./℃, guaranteeing the reliability of data.
It has a built - in temperature compensation function, which reduces the influence of temperature on the measurement results and adapts to the measurement requirements in different ambient temperatures.
It has a design to protect the sensor from contamination, extending the service life of the sensor and reducing maintenance costs.
It has a one - key zero - adjustment function, which is simple and convenient to operate. It adopts a full - digital key - based calibration method, which is convenient for users to adjust parameters.
The power supply voltage is +14VDC～30VDC, adapting to different power supply environments and enhancing the applicability of the device.
It uses a corrosion - resistant ceramic sensor, which cancomplex environments and improve the durability of the equipment.
work stably in
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测量范围 Measuring range |
133000(Pa)～13.3(Pa) |
13300(Pa)～1.33(Pa) |
1330(Pa)～0.133(Pa) |
133(Pa)-0.0133(Pa) |
13.3(Pa)～0.00133(Pa) |
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订购号 Order number |
13 |
12 |
11 |
10 |
01 |
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供电电源 Power supply |
+14VDC~30VDC Vpp≤0.5V |
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输出阻抗 Output impedance |
0Ω(Short circuit protection) |
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负载阻抗 Load impedance |
10KΩ |
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调节方式 Regulation mode |
Full digital key calibration |
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电气连接 Electrical connection |
DB15 needle |
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重量 weight |
≤300g |
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尺寸 dimension |
Approx. 60×60×120(length × width × depth)(mm) |
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精度等级 accuracy level |
Class 0.25 |
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读数误差 Reading error |
0.15% reading |
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零点漂移 Zero drift |
0.005%F.S./℃ |
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满度漂移 Full drift |
0.04%F.S./℃ |
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分辨率 Resolution |
0.003%F.S. |
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测量气体关系 Measure other relationships |
Irrespective of |
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工作电流 Working current |
≤15mA |
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输出电压 Output voltage |
-0.1VDC～10.5VDC |
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真空压力、输出电压关系 Vacuum pressure, output voltage |
linearity |
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延迟时间 Delay time |
≥10KPa(F.S.)40mS(Output voltage delay) ≥1KPa(F.S.)130mS(output voltage delay) |
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允许压强(绝对) Allowable pressure (absolute) |
3atm(atmospheric pressure) |
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破坏压强(绝对) Breaking pressure (absolute) |
5atm |
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A well - known semiconductor manufacturing enterprise has extremely high requirements for the control of vacuum during the production of high - end chips. Before introducing the diaphragm capacitance vacuum gauge RBM350, the vacuum - measuring equipment used by the enterprise had limited accuracy, resulting in difficulty in improving the product yield in key processes such as lithography and etching. After adopting RBM350, its high - precision measurement characteristics enable the vacuum during the production process to be accurately monitored. In the wafer lithography process, the fast - stabilization and quick - recovery performance of RBM350 ensures real - time and stable monitoring of the vacuum environment, and timely feedback on changes in vacuum, avoiding abnormal exposure of photoresist caused by vacuum fluctuations. At the same time, its corrosion - resistant ceramic sensor works stably in the complex chemical vapor deposition (CVD) environment, ensuring the long - term and reliable operation of the equipment. Eventually, the chip yield of the enterprise has been greatly improved, the production efficiency has been significantly enhanced, and the production cost has been effectively reduced.
In experiments in physics, chemistry, materials science, etc., it is used to accurately measure the vacuum degree inside the experimental device. For example, in materials science research, the preparation and performance testing of materials require precise control of the vacuum environment. RBM350 can ensure the purity and stability of the experimental environment and provide reliable data support for researchers.
It plays a key monitoring role in processes such as wafer growth, lithography, etching, thin - film deposition, and atomic layer deposition. During the wafer growth process, maintaining a dust - free and impurity - free environment is crucial. RBM350 can accurately measure the vacuum degree to ensure the stability of the growth environment. When a lithography machine is manufacturing integrated circuits, it needs to operate in a vacuum environment, and RBM350 can ensure the precise exposure of photoresist. In processes such as plasma etching and chemical vapor deposition (CVD), physical vapor deposition (PVD), it helps to achieve uniform and high - quality thin - film deposition.
It ensures the quality and uniformity of coating. By accurately measuring the vacuum degree, the coating process parameters can be adjusted to make the coating more uniform and firm.
It precisely controls the vacuum degree to achieve the desired heat - treatment effect and meet the heat - treatment requirements of different materials and products.
In medical equipment such as vacuum pumps and ventilators, it measures and monitors the pressure changes inside the equipment to ensure the normal operation of the equipment and the safety of patients. For example, in a ventilator, RBM350 can real - time monitor the airway pressure to ensure the effectiveness of patient respiratory treatment.
In the manufacturing and testing of spacecraft, it simulates the space environment, measures and records the changes in vacuum degree, and provides data support for the design and improvement of spacecraft. When testing some components of spacecraft in a vacuum environment, RBM350 can accurately measure the vacuum degree to help engineers evaluate the performance of components.
RBM350 adopts a full - digital key - based calibration method. Users can adjust and calibrate parameters through the keys according to the equipment operation manual, which is simple and convenient to operate.
RBM350 has a temperature compensation function, with a zero drift of only 0.005% F.S./℃ and a full - scale drift of 0.04% F.S./℃. It can effectively reduce the influence of temperature on the measurement accuracy and maintain relatively stable measurement accuracy in different temperature environments.
RBM350 has a design to protect the sensor from contamination. Its structure and materials can effectively block external impurities from entering the sensor, extending the service life of the sensor and reducing maintenance costs.
RBM350 can quickly recover after being exposed to atmospheric pressure. Although the specific recovery time is not clearly given, it can meet the needs of rapid - recovery measurement in most scenarios in practical applications.
Its high - precision measurement characteristics and fast - stabilization and quick - recovery performance can accurately and timely feedback the changes in vacuum degree, helping engineers adjust process parameters in a timely manner to ensure the maintenance of a stable vacuum environment in key processes such as lithography and etching, thereby guaranteeing product quality and production efficiency.
Within the power supply voltage range of +14VDC～30VDC, RBM350 can work stably, and its performance will not be significantly affected by the fluctuation of the power supply voltage within this range.
The linear relationship allows users to more intuitively judge the vacuum pressure based on the output voltage, which is convenient for data analysis and process control, and improves work efficiency and accuracy.
It is necessary to ensure that the equipment is firmly installed, the electrical connection is correct, and it is protected from electromagnetic interference. At the same time, the equipment should be regularly calibrated and maintained to ensure the accuracy of measurement data to ensure the normal operation of medical equipment and the safety of patients.
It is selected according to the vacuum degree requirements of the actual application scenario. For example, the lithography process in semiconductor manufacturing may require a measurement range of 13.3(Pa )~ 0.00133(Pa), while vacuum heat treatment may require a range of 133000(Pa)~ 13.3(Pa).
RBM350 weighs 300 grams and has a size of approximately φ 55×120 (diameter×height) (mm). It is small in size and light in weight, making it easy to install in various equipment and experimental devices and has low requirements for installation space.
Tel : +86-15880223078
WhatsApp : +86-13959235484
Email : vacuum@xiamenbest.com
Address : No. 19, Dongan Qianzhanli, Jimei District, Xiamen city china
