Leading International Semiconductor Manufacturer – The Guardian of Advanced Process Yield

Customer Background:
"ChipInnovation International" is a globally renowned semiconductor chip manufacturer. Its advanced 5-nanometer process production line has extremely stringent requirements for the cleanliness and sealing of vacuum systems. Any minute leak can cause process gas contamination and chamber wall corrosion, leading to a significant drop in product yield and massive economic losses.

Pain Points:

Yield Mystery: Unexplained periodic yield fluctuations occurred in individual production tools. Minute leaks in the vacuum chambers were suspected, but existing detection equipment lacked the precision to locate and quantify them.

High Downtime Cost: Production tool downtime costs were enormous per hour. Traditional leak detection methods were time-consuming, requiring chamber disassembly and offline testing, resulting in unacceptable downtime.

Complex Detection Needs: Numerous interfaces and welds required checking, demanding equipment with not only high sensitivity but also fast response to efficiently pinpoint leak locations.

Solution:
The TX500 Helium Leak Detector was integrated into the online vacuum system for precise in-situ leak testing. Its exceptional sensitivity of 5.0E-13 Pa.m³/s and rapid response time of ≤0.5 seconds were utilized, along with the sniffer mode, to scan all suspicious points.

Results:

Pinpoint Accuracy, Mystery Solved: The TX500 successfully detected multiple extremely minute leaks at chamber welds and valve seals that had previously gone unnoticed. The root cause was quickly identified, resolving the long-standing yield fluctuation issue.

Efficiency Revolution, Reduced Downtime: Online testing avoided chamber disassembly, reducing leak detection time from several days to just hours. This allowed tools to return to production rapidly, saving significant downtime costs.

Quality Enhanced: After彻底 repairing the leaks, production line process stability significantly improved, resulting in a ~12% increase in product yield and annual benefits exceeding tens of millions of USD.

Customer Testimonial:
“The TX500 is like a ‘stethoscope’ for our vacuum systems, able to hear the faintest ‘irregularities’. Its ultimate sensitivity and lightning-fast response give us a real ‘investigation tool’ when facing yield challenges. We are now completely confident conducting preventive maintenance and troubleshooting; it's the unsung hero ensuring the stable operation of our advanced production lines.”