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RBM350 Thin Film Vacuum Transmitter Case f 11, 2025

The Ruibao vacuum gauge RBM350 with an accuracy level of 0.25 has the advantages of a full-scale range from 0.1 Torr to 1000 Torr, rapid stability after power on, rapid recovery after exposure to atmospheric pressure, excellent long-term signal stability, temperature compensation, sensor protection against pollution, one key zero adjustment function, wide range power supply, and corrosion-resistant ceramic sensors. It is suitable for the following fields:

Research field: Used in physics, chemistry, materials science and other experiments to measure the vacuum degree inside experimental equipment, ensuring the purity and stability of the experimental environment.

For example, in materials science research, precise control of the vacuum environment may be required for material preparation and performance testing.

Some reactions in chemical experiments require specific vacuum conditions to be carried out.

Industrial production:

Semiconductor manufacturing: In processes such as wafer growth, photolithography, etching, thin film deposition, and atomic layer deposition, monitoring the vacuum level during the production process plays a key role in ensuring product quality and production efficiency.

Maintaining a dust-free and impurity free environment is crucial during the wafer growth process.

Photolithography machines need to operate in a vacuum environment when manufacturing integrated circuits to ensure precise exposure of photoresist.

Using vacuum technology for plasma etching to remove unwanted material layers on semiconductor silicon wafers.

Chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes help achieve uniform and high-quality thin film deposition.

Vacuum coating: Ensure the quality and uniformity of the coating.

Vacuum heat treatment: Accurately control the vacuum degree to achieve the desired heat treatment effect.

Medical field: In medical equipment such as vacuum pumps, ventilators, etc., pressure changes inside the equipment are measured and monitored to ensure the normal operation of the equipment and the safety of patients.

Aerospace: In the manufacturing and testing of spacecraft, simulate the space environment, measure and record vacuum changes, and provide data support for spacecraft design and improvement. For example, conducting vacuum testing on some components of spacecraft.

It should be noted that in practical applications, appropriate vacuum gauge models and parameters need to be selected based on specific needs and usage environments to ensure measurement accuracy and reliability. Meanwhile, proper installation, use, and maintenance are also important factors in ensuring the performance of vacuum gauges.

To ensure that the Ruibao vacuum gauge RBM350 maintains a precision of 0.25 level during use, it is necessary to start from multiple aspects such as installation environment, operating standards, regular maintenance and calibration.

1. Optimize the installation environment

1. Control temperature fluctuations: RBM350 has zero drift (0.005% f.s/℃) and full drift (0.04% f.s/℃), and temperature changes can affect measurement accuracy. It should be installed in a relatively stable temperature environment, avoiding proximity to heat sources, air conditioning vents, etc. If the ambient temperature changes significantly, it is recommended to install air conditioning or other temperature control devices to keep the temperature fluctuations within a small range and reduce the impact of temperature on accuracy.

2. Avoid vibration and impact: Strong vibration and impact may damage the internal structure of the vacuum gauge, affecting measurement accuracy. When installing, choose a location far away from large mechanical equipment and vibration sources, such as punching machines, large motors, etc. If it is impossible to avoid a vibration environment, cushioning devices such as shock absorbers can be used to reduce the transmission of vibration to the vacuum gauge.

3. Preventing pollution and erosion: Although RBM350 is designed to protect sensors from pollution, it is still necessary to pay attention to clean usage environments. The installation location should be away from sources of pollution such as dust and corrosive gases. Gas purification devices can be installed in environments with chemical gases; In a dusty environment, install a dust cover for the vacuum gauge and regularly clean the surrounding environment to prevent dust from accumulating inside the vacuum gauge and affecting accuracy.

2. Standardize the operation process

1. Connect the equipment correctly: Strictly follow the instructions for electrical and pipeline connections. When making electrical connections, ensure that the DB15 pin plug is securely plugged in to avoid poor contact and abnormal signal transmission. The pipeline connection should ensure good sealing to prevent air leakage from affecting vacuum measurement. Use appropriate sealing materials, such as sealing gaskets, and regularly inspect the sealing area for leaks.

2. Reasonably set parameters: Based on actual measurement needs, correctly set measurement range and other parameters. RBM350 has multiple measurement ranges, such as 133000 (pa)~13.3 (pa), 13300 (pa)~1.33 (pa), etc. Choosing the appropriate range can improve measurement accuracy. If the measured value exceeds the selected range, it may result in inaccurate measurements or even damage to the equipment. When measuring lower vacuum levels, select the gear corresponding to the lower range to ensure that the measured value is within a reasonable range within the range.

3. Regular one key zero adjustment: RBM350 has one key zero adjustment function and should be adjusted regularly. Before each use or after a long period of inactivity, reset to zero first. Zero adjustment ensures that the vacuum gauge is in a stable environment, avoiding interference sources around it that may affect the zero adjustment results, and ensuring the accuracy of the measurement.

3. Regular maintenance and calibration

1. Daily cleaning inspection: Regularly clean the vacuum gauge housing, remove surface dust and stains, and prevent them from entering the interior and affecting performance. Check for any damage to the appearance, loose interfaces, etc. If any damage is found on the casing, replace it promptly; When the interface becomes loose, tighten it again to ensure the normal operation of the equipment.

2. Professional calibration and maintenance: Perform professional calibration on RBM350 at intervals recommended by the manufacturer or after a certain number of uses. It can be sent back to the manufacturer or a qualified third-party calibration institution for calibration using high-precision standard vacuum equipment. During the calibration process, adjustments and corrections are made to reading errors, zero drift, and other indicators to restore them to the 0.25 level accuracy standard. If abnormal measurement results are found during use, calibration should be carried out in a timely manner to ensure reliable measurement accuracy.

The RBM350 vacuum gauge with an accuracy level of 0.25 is widely used in the following industries:

Research field: Used in physics, chemistry, materials science and other experiments to measure the vacuum degree inside experimental equipment, ensuring the purity and stability of the experimental environment.

Semiconductor manufacturing: used in processes such as etching, CVD (chemical vapor deposition), PVD (physical vapor deposition), etc. to monitor the vacuum level during the production process, ensuring product quality and production efficiency.

Vacuum coating: not only used for monitoring and controlling vacuum degree, but also plays an important role in improving coating quality, optimizing process flow, and ensuring system safety.

Industrial vacuum equipment: can be used as a standard vacuum gauge.

In addition, in some other industries that have high requirements for vacuum degree, such as:

Photovoltaic industry: It may be used in processes such as PECVD.

Metallurgical industry: for example, in vacuum heat treatment and other fields.

Pharmaceutical industry: Processes such as freeze-drying require precise vacuum control to ensure product quality.

It should be noted that the specific application needs to be determined based on actual production requirements and process conditions. At the same time, different industries may have different requirements for the accuracy and measurement range of vacuum gauges. When using, it should be ensured that the performance and parameters of the vacuum gauge can meet the corresponding requirements.

The accuracy level of the Ruibao vacuum gauge RBM350 is 0.25, which is mainly determined based on key indicators such as reading error, zero drift, and full drift.

Reading error: The reading error of RBM350 varies in different pressure ranges. When the measured pressure is ≥ 133Pa, the reading error is 0.2%; When the measured pressure is ≤ 133Pa, the reading error is 0.5%. The magnitude of the reading error directly reflects the degree of deviation between the measured value and the actual value of the vacuum gauge. The smaller the error, the more accurate the measurement, which plays an important role in determining the accuracy of 0.25 level. For example, when measuring a pressure of 1000Pa, according to the error standard for ≥ 133Pa, the error range of the measured value is within 0.2% of the actual value, and the measurement result is relatively accurate.

Zero drift: The zero drift index is 0.005% f.s/℃, which means that the full-scale zero drift per degree Celsius is 0.005%. This indicator reflects the ability of the vacuum gauge to maintain zero stability in different temperature environments. The smaller the zero drift, the smaller the zero deviation caused by temperature influence on the vacuum gauge, and the higher the stability and accuracy of the measurement results, which is one of the important factors for evaluating the accuracy level. If used in environments with large temperature changes, a smaller zero drift can ensure that the vacuum gauge always maintains a relatively accurate measurement starting point.

Full drift: The full drift is 0.04% f.s/℃, reflecting the degree of change in the overall measurement value of the vacuum gauge with temperature changes. The smaller the full drift value, the less the influence of temperature interference on the measurement results of the vacuum gauge, and the better it can ensure that the measurement accuracy meets the standard requirement of 0.25 level under different temperature conditions. When the ambient temperature fluctuates, a small full drift means that the measurement results will not deviate significantly from the true value due to temperature changes.

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