Taixing Pump Launches Professional Repair Service for Leybold Helium Mass Spectrometer Leak Detectors

Taixing Pump today announced a specialized, original-equipment-grade repair service for Leybold helium mass spectrometer leak detectors, including Phoenix series models (L300 / L500 / Vario / Quadro) and L200. These instruments—recognized for their 180° magnetic-deflection mass spectrometer chambers and high-performance TURBOVAC turbomolecular pumps—are critical to semiconductor fabrication, high-energy physics, industrial leak testing and other precision fields. The new service is designed to reduce downtime, prevent sensitivity loss from unprofessional servicing, and restore instruments to factory-level performance with full-process guarantees.

Service Highlights

• Full-series model coverage: Expert diagnostics and targeted repairs for Phoenix series and L200 units, addressing typical faults such as E‑Code alarms (turbomolecular pump speed/temperature/bearing anomalies), high helium background (>1.0E‑8 mbar·L/s) and calibration errors (e.g., "Signal too low", "TL Error").
• Original-equipment-grade repair processes: Disassembly and ultrasonic cleaning of the mass spectrometer chamber, yttrium‑iridium filament replacement, TURBOVAC overhaul with original-spec ceramic bearings and special lubricating oil pack replacement, standard leak hole calibration and gas refilling.
• Full-lifecycle support: Scheduled maintenance aligned with original factory standards (ion source replacement every 6–12 months, mechanical pump oil change every 6 months, standard leak hole calibration every 12 months) plus precision relocation services that include transportation locking, pressure relief, oil-backflow prevention and a 4-hour warm-up/calibration after reinstallation.
• Flexible and fast response: 24-hour on-site repair for large or production-line units and mail-in repair for portable detectors. A comprehensive test report is issued within 24 hours of equipment receipt, and standard warranty coverage is provided after repair.

Technical Guarantees and Typical Repairs

• Ion source contamination—complete chamber disassembly, carbon deposition removal and filament replacement to recover detection sensitivity.
• Turbomolecular pump bearing wear—replacement with original ceramic bearings and special lubricants to restore rotor speed and reduce E‑Code faults.
• Clogged or drifted standard leak holes—precision re‑calibration and gas refilling (TL series checks) to ensure traceable leak rate accuracy.
• Solenoid valve aging and seal replacement—to eliminate helium backflow and lower helium background to factory-spec levels.

Efficient Workflow

• Rapid triage and diagnostic report within 24 hours of receipt.
• Cleanroom repair environment for core component overhaul to prevent secondary contamination.
• Full-range calibration using certified standard leak references and verification against ISO tightness criteria.

Case Study — 36‑Hour Recovery for a Semiconductor Manufacturer

A leading domestic semiconductor fab reported an E‑Code 23 alarm (abnormal turbomolecular pump speed) on a Leybold Phoenix L500 used on a critical production test line. The unit also exhibited a helium background consistently above 5.0E‑8 mbar·L/s, halting leak testing and forcing two packaging lines to cut output. Potential losses exceeded RMB 30,000 per hour.

Actions taken:

1. Emergency dispatch: Engineers were on-site within 3 hours. Diagnostics identified worn TURBOVAC bearings and ion source carbon deposition, plus aging seals on solenoid valve V2 causing helium backflow.
2. Cleanroom overhaul: TURBOVAC was fully rebuilt with original ceramic bearings and lubricant packs; mass spectrometer chamber and ion source were cleaned; yttrium‑iridium filament and solenoid seals replaced.
3. Precision calibration: Full calibration using a TL7 standard leak and system tightness optimization to meet ISO detection criteria.

Results: The L500 returned to stable operation with helium background reduced below 8.0E‑10 mbar·L/s, E‑Code alarm cleared, and detection accuracy restored to factory levels. Production resumed in 36 hours, avoiding more than RMB 1.08 million in potential losses. A tailored annual maintenance plan with semiannual on-site calibration was delivered; the instrument has operated fault-free for 12 months under the new regimen.

Free Resources and How to Engage

To assist customers in rapid troubleshooting, Taixing Pump provides a free downloadable "Complete Error Code Comparison Table for Leybold Phoenix Series (Chinese Version)". For service inquiries, repairs, maintenance plans or relocation requests, contact our team to receive a free initial diagnostic and customized repair proposal.

Learn more or submit a service request on our Service Page. For technical support and maintenance scheduling, visit our Technical Support portal. To download the error code comparison and service documentation, go to our Download Center. For urgent repair dispatch or quotation, use our Repair Request form.

Whether the issue is persistent alarms, sensitivity drift, or the need for routine preventive maintenance and precision relocation, Taixing Pump’s original-equipment-grade technical team offers certified repair procedures and rapid, accountable service to keep your Leybold helium mass spectrometer leak detectors operating at peak performance.