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Application cases and common problem analysis of screw vacuum pumps f 06, 2025

Here is the detailed summary of screw vacuum pump application cases and common issue analysis:

 


 

I. Typical Application Cases

II. 1. Semiconductor Manufacturing

 

Scenario: Maintaining a vacuum environment in wafer processing (e.g., CVD, PVD equipment).

Requirements: Oil-free, corrosion-resistant, high pumping speed.

Solution: Dry screw vacuum pump (stainless steel) paired with a Roots pump for enhanced efficiency.

Result: Avoids oil contamination, stable pumping speed of 1000 m³/h, ultimate vacuum reaches 0.01 Pa.

2. Pharmaceutical Industry

Scenario: Vacuum system for freeze dryers (lyophilizers).

Requirements: GMP compliance, easy cleaning, solvent resistance.

Solution: Sanitary-grade screw pump with electropolished surfaces and integrated steam sterilization.

Result: Vacuum level below 5 Pa, 20% shorter production cycles, no cross-contamination risk.

3. Chemical Processes

 

Scenario: Styrene monomer recovery (high-temperature, condensable gases).

Challenge: Gas condensation causing pump seizure.

Improvement: Added heating jackets (120°C) to the pump chamber and installed a pre-condenser to separate condensable gases.

Outcome: Continuous operation exceeding 4000 hours without failure, recovery efficiency improved by 35%.

4. Lithium Battery Production

 

Scenario: Drying process after electrode coating.

Configuration: Screw pump + nitrogen purge system to prevent dust accumulation.

Advantage: Dry operation eliminates explosion risks from lithium-oil contact.

 

 


 

II. Common Failures & Solutions

 

High-Temperature Alarm

 

Cause: Insufficient cooling/excessive gas load.

 

Action: Check coolant flow; clean heat exchanger; reduce inlet gas temperature.

 

Abnormal Noise or Vibration

 

Possible Issue: Rotor wear/bearing damage.

 

Measure: Inspect rotor clearance (should be 0.1–0.3 mm); replace bearings.

 

Vacuum Level Drop

 

Troubleshooting Steps:

 

Leak detection (helium mass spectrometer).

 

Inspect seal aging (replace FKM seals).

 

Clean carbon deposits in the pump chamber (use specialized solvent).

 

Motor Overload

 

Triggers: Excessive inlet pressure/unstable power supply.

 

Adjustment: Install inlet throttle valve; check inverter output.

 

 


 

III. Key Selection Parameters

Ultimate Vacuum: Select based on process requirements (e.g., 0.1 Pa requires a Roots pump combination).

 

Pumping Speed Curve: Focus on actual operating conditions (non-standard data).

Corrosion Resistance: Acidic gases may require nickel-plated rotors or special coatings.

Energy Efficiency Ratio: Variable frequency drives (VFD) can save over 30% energy (ideal for fluctuating loads).


 

IV. Maintenance Optimization Tips

 

Routine: Weekly checks on oil level (for oil-lubricated models) and filter pressure drop.

 

Quarterly: Clean inlet filters; calibrate vacuum sensors.

 

Annual: Replace bearing lubricant; perform dynamic balance tests.

 

Spare Parts: Stock rotor repair kits to minimize downtime.

 


 

V. Technological Advancements

Magnetic Levitation Screw Pumps: Contactless bearings extend lifespan to 100,000 hours (ideal for high-purity applications).

 

Smart Diagnostics: IoT-enabled predictive maintenance (e.g., vibration spectrum analysis for early rotor imbalance warnings).

 


 

For further details on specific industries or fault diagnosis, feel free to specify your needs!

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