Here is the detailed summary of screw vacuum pump application cases and common issue analysis:
Scenario: Maintaining a vacuum environment in wafer processing (e.g., CVD, PVD equipment).
Requirements: Oil-free, corrosion-resistant, high pumping speed.
Solution: Dry screw vacuum pump (stainless steel) paired with a Roots pump for enhanced efficiency.
Result: Avoids oil contamination, stable pumping speed of 1000 m³/h, ultimate vacuum reaches 0.01 Pa.
Scenario: Vacuum system for freeze dryers (lyophilizers).
Requirements: GMP compliance, easy cleaning, solvent resistance.
Solution: Sanitary-grade screw pump with electropolished surfaces and integrated steam sterilization.
Result: Vacuum level below 5 Pa, 20% shorter production cycles, no cross-contamination risk.
Scenario: Styrene monomer recovery (high-temperature, condensable gases).
Challenge: Gas condensation causing pump seizure.
Improvement: Added heating jackets (120°C) to the pump chamber and installed a pre-condenser to separate condensable gases.
Outcome: Continuous operation exceeding 4000 hours without failure, recovery efficiency improved by 35%.
Scenario: Drying process after electrode coating.
Configuration: Screw pump + nitrogen purge system to prevent dust accumulation.
Advantage: Dry operation eliminates explosion risks from lithium-oil contact.
High-Temperature Alarm
Cause: Insufficient cooling/excessive gas load.
Action: Check coolant flow; clean heat exchanger; reduce inlet gas temperature.
Abnormal Noise or Vibration
Possible Issue: Rotor wear/bearing damage.
Measure: Inspect rotor clearance (should be 0.1–0.3 mm); replace bearings.
Vacuum Level Drop
Troubleshooting Steps:
Leak detection (helium mass spectrometer).
Inspect seal aging (replace FKM seals).
Clean carbon deposits in the pump chamber (use specialized solvent).
Motor Overload
Triggers: Excessive inlet pressure/unstable power supply.
Adjustment: Install inlet throttle valve; check inverter output.
Ultimate Vacuum: Select based on process requirements (e.g., 0.1 Pa requires a Roots pump combination).
Pumping Speed Curve: Focus on actual operating conditions (non-standard data).
Corrosion Resistance: Acidic gases may require nickel-plated rotors or special coatings.
Energy Efficiency Ratio: Variable frequency drives (VFD) can save over 30% energy (ideal for fluctuating loads).
Routine: Weekly checks on oil level (for oil-lubricated models) and filter pressure drop.
Quarterly: Clean inlet filters; calibrate vacuum sensors.
Annual: Replace bearing lubricant; perform dynamic balance tests.
Spare Parts: Stock rotor repair kits to minimize downtime.
Magnetic Levitation Screw Pumps: Contactless bearings extend lifespan to 100,000 hours (ideal for high-purity applications).
Smart Diagnostics: IoT-enabled predictive maintenance (e.g., vibration spectrum analysis for early rotor imbalance warnings).
For further details on specific industries or fault diagnosis, feel free to specify your needs!