The corrosion-resistant version of MEMS Pirani vacuum gauge has been widely used in multiple fields due to its excellent corrosion resistance and precise measurement performance. It can work stably in environments with corrosive gases or chemicals, providing reliable vacuum measurement data for related production and scientific research activities.

1. In the field of semiconductor manufacturing: During the semiconductor manufacturing process, etching, photolithography, and other processes require extremely high vacuum environments and use highly corrosive gases such as chlorine gas and nitrogen trifluoride. The Pirani vacuum gauge from Thyracont, a German company, is used to monitor the vacuum level inside the chamber during chip sensor packaging and wafer bonding processes. The ceramic sensor with fluororubber seal has the characteristic of chemical corrosion resistance, which can ensure stable operation in harsh chemical environments, ensuring the accuracy of semiconductor manufacturing processes and product quality.

2. Chemical production industry: Chemical production often involves various strong acids, strong alkalis, and corrosive gases, which greatly test the corrosion resistance of equipment. In the vacuum distillation system of the coal tar deep processing industry, vacuum equipment faces complex corrosive environments. The relevant technology developed by Zaozhuang Jiefuyi Company has solved the problem of corrosion in vacuum equipment. The corrosion-resistant version of MEMS Pirani vacuum gauge can be applied to such chemical production scenarios, accurately measuring vacuum pressure, ensuring safe and stable operation of the production process, while reducing equipment failures and maintenance costs caused by corrosion.

3. Food and pharmaceutical industry: In the vacuum drying and packaging process of the food and pharmaceutical industry, corrosive disinfectants or preservation gases may be used to prevent microbial growth and extend product shelf life. The corrosion-resistant version of MEMS Pirani vacuum gauge can be used for vacuum measurement in these processes, ensuring that the vacuum environment inside the packaging meets the requirements and guaranteeing the quality and safety of food and medicine. For example, in the process of vacuum packaging of food, precise control of vacuum degree can effectively extend the shelf life of food and prevent food spoilage.

What are the application cases of corrosion-resistant MEMS Pirani vacuum gauges in the field of semiconductor manufacturing?

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The corrosion-resistant version of MEMS Pirani vacuum gauge plays an important role in multiple key stages of semiconductor manufacturing due to its anti-corrosion characteristics and precise measurement capabilities, ensuring the stability of the production process and the high quality of products.

1. Chip sensor packaging and wafer bonding process: During the semiconductor chip sensor packaging and wafer bonding process, it is necessary to operate in a vacuum environment. The Pirani vacuum gauge from Thyracont, a German company, features a ceramic sensor sealed with fluororubber that is resistant to chemical corrosion and can accurately monitor the vacuum level inside the chamber during the process. During loading, the bonding chamber is evacuated by a rough machining pump, and the system smoothly switches to a high vacuum pump. The Pirani vacuum gauge precisely controls the absolute pressure in the bypass to prevent damage to the high vacuum system; During the bonding process, continuously monitor the vacuum level inside the chamber to ensure compliance with process requirements and guarantee product quality.

2. Semiconductor etching and CVD applications: Sens4's MEMS Pirani sensor with ceramic protective coating is designed specifically for semiconductor etching and chemical vapor deposition (CVD) applications. Ceramics have high corrosion resistance and can effectively resist the corrosive gases and etching processes used in semiconductor manufacturing. In etching and CVD processes, precise vacuum measurement is crucial for the stability of the process and product quality. This sensor can work stably in such harsh chemical environments, providing accurate vacuum degree data to ensure the accuracy and consistency of the process.

3. Monitoring vacuum information of semiconductor equipment: A research team has developed an integrated composite nano forest MEMS thermopile Pirani sensor, which can successfully monitor vacuum information of different semiconductor manufacturing equipment. This sensor has the advantages of expanded gas heat conduction, enhanced light absorption, etc. Its output voltage is increased, detection lower limit is extended, and sensitivity is improved. It can accurately measure vacuum degree in complex semiconductor manufacturing environments, providing key data support for the stable operation and process control of equipment.

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What are the new developments in the application cases of corrosion-resistant MEMS Pirani vacuum gauges in the semiconductor manufacturing field?

Provide specific application data of corrosion-resistant MEMS Pirani vacuum gauges in the field of semiconductor manufacturing

Will the application of corrosion-resistant MEMS Pirani vacuum gauges in semiconductor manufacturing be affected by temperature?

The corrosion-resistant version of MEMS Pirani vacuum gauge has been widely used in multiple fields due to its excellent corrosion resistance and precise measurement performance. It can work stably in environments with corrosive gases or chemicals, providing reliable vacuum measurement data for related production and scientific research activities.

1. In the field of semiconductor manufacturing: During the semiconductor manufacturing process, etching, photolithography, and other processes require extremely high vacuum environments and use highly corrosive gases such as chlorine gas and nitrogen trifluoride. The Pirani vacuum gauge from Thyracont, a German company, is used to monitor the vacuum level inside the chamber during chip sensor packaging and wafer bonding processes. The ceramic sensor with fluororubber seal has the characteristic of chemical corrosion resistance, which can ensure stable operation in harsh chemical environments, ensuring the accuracy of semiconductor manufacturing processes and product quality.

2. Chemical production industry: Chemical production often involves various strong acids, strong alkalis, and corrosive gases, which greatly test the corrosion resistance of equipment. In the vacuum distillation system of the coal tar deep processing industry, vacuum equipment faces complex corrosive environments. The relevant technology developed by Zaozhuang Jiefuyi Company has solved the problem of corrosion in vacuum equipment. The corrosion-resistant version of MEMS Pirani vacuum gauge can be applied to such chemical production scenarios, accurately measuring vacuum pressure, ensuring safe and stable operation of the production process, while reducing equipment failures and maintenance costs caused by corrosion.

3. Food and pharmaceutical industry: In the vacuum drying and packaging process of the food and pharmaceutical industry, corrosive disinfectants or preservation gases may be used to prevent microbial growth and extend product shelf life. The corrosion-resistant version of MEMS Pirani vacuum gauge can be used for vacuum measurement in these processes, ensuring that the vacuum environment inside the packaging meets the requirements and guaranteeing the quality and safety of food and medicine. For example, in the process of vacuum packaging of food, precise control of vacuum degree can effectively extend the shelf life of food and prevent food spoilage.

What are the application cases of corrosion-resistant MEMS Pirani vacuum gauges in the field of semiconductor manufacturing?

The corrosion-resistant version of MEMS Pirani vacuum gauge plays an important role in multiple key stages of semiconductor manufacturing due to its anti-corrosion characteristics and precise measurement capabilities, ensuring the stability of the production process and the high quality of products.

1. Chip sensor packaging and wafer bonding process: During the semiconductor chip sensor packaging and wafer bonding process, it is necessary to operate in a vacuum environment. The Pirani vacuum gauge from Thyracont, a German company, features a ceramic sensor sealed with fluororubber that is resistant to chemical corrosion and can accurately monitor the vacuum level inside the chamber during the process. During loading, the bonding chamber is evacuated by a rough machining pump, and the system smoothly switches to a high vacuum pump. The Pirani vacuum gauge precisely controls the absolute pressure in the bypass to prevent damage to the high vacuum system; During the bonding process, continuously monitor the vacuum level inside the chamber to ensure compliance with process requirements and guarantee product quality.

2. Semiconductor etching and CVD applications: Sens4's MEMS Pirani sensor with ceramic protective coating is designed specifically for semiconductor etching and chemical vapor deposition (CVD) applications. Ceramics have high corrosion resistance and can effectively resist the corrosive gases and etching processes used in semiconductor manufacturing. In etching and CVD processes, precise vacuum measurement is crucial for the stability of the process and product quality. This sensor can work stably in such harsh chemical environments, providing accurate vacuum degree data to ensure the accuracy and consistency of the process.

3. Monitoring vacuum information of semiconductor equipment: A research team has developed an integrated composite nano forest MEMS thermopile Pirani sensor, which can successfully monitor vacuum information of different semiconductor manufacturing equipment. This sensor has the advantages of expanded gas heat conduction, enhanced light absorption, etc. Its output voltage is increased, detection lower limit is extended, and sensitivity is improved. It can accurately measure vacuum degree in complex semiconductor manufacturing environments, providing key data support for the stable operation and process control of equipment.

What are the new developments in the application cases of corrosion-resistant MEMS Pirani vacuum gauges in the semiconductor manufacturing field?

The corrosion-resistant version of MEMS Pirani vacuum gauge is continuously expanding its application in the semiconductor manufacturing field, playing an increasingly important role in process control, equipment maintenance, and related technologies and application scenarios are also constantly innovating.

1. New protective coating enhances applicability: Sens4 company will launch a MEMS Pirani sensor series with ceramic or poly (p-xylene) protective coating in 2023. Among them, ceramic protective coatings are highly corrosion-resistant and designed specifically for semiconductor etching and chemical vapor deposition (CVD) applications. This innovation enables sensors in semiconductor manufacturing to stably and accurately measure vacuum levels in the face of highly corrosive gases and complex process environments, providing strong support for precise process control. During the semiconductor etching process, highly corrosive gases such as chlorine gas and nitrogen trifluoride are used. Previous vacuum gauges were difficult to operate stably in such environments for a long time. However, Sens4's sensor, with its ceramic protective coating, can effectively resist corrosion and ensure measurement accuracy and stability.

2. Assist in more accurate vacuum information monitoring of semiconductor equipment: A research team has developed an integrated composite nano forest MEMS thermal stack Pirani sensor, which can be used to monitor vacuum information of different semiconductor manufacturing equipment. This sensor has advantages such as expanded gas heat conduction, enhanced light absorption, increased output voltage, extended detection limit, and improved sensitivity. In semiconductor manufacturing equipment, such as lithography machines, etching machines, etc., the requirement for vacuum degree is extremely high, and even small changes in vacuum degree may affect product quality. This new type of sensor can more sensitively perceive changes in vacuum level, providing more accurate data support for the stable operation of equipment and process control.

3. Widely used in key stages of semiconductor manufacturing: Thyracont's Pirani vacuum gauge has been maturely applied in chip sensor packaging and wafer bonding in semiconductor manufacturing. During the packaging process of chip sensors, this vacuum gauge is used to monitor the vacuum level inside the chamber to ensure that the packaging environment meets the requirements; During wafer bonding, the bonding effect is ensured by monitoring the vacuum level. Accurate control of vacuum degree is crucial for the bonding quality during wafer bonding. Thyracont's Pirani vacuum gauge can accurately measure and provide a stable vacuum environment guarantee for the bonding process.