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TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications
TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications
TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications

TXFJ-300 Ultra-High Vacuum Pumping Unit for Semiconductor and Scientific Applications

The TXFJ-300 Ultra-High Vacuum Pumping Unit delivers a 300 L/s pumping speed and ≤3×10⁻⁵ Pa ultimate vacuum. With an air-cooled molecular pump, compact mobile design, and high-precision vacuum monitoring, it’s ideal for semiconductor, mass spectrometry, and vacuum coating applications.

 

Why Choose the TXFJ-300 Ultra-High Vacuum Pumping Unit?

The TXFJ-300 from Taixing Industrial is a state-of-the-art ultra-high vacuum pumping unit designed for demanding laboratory and industrial environments. Featuring a 300 L/s air-cooled composite molecular pump paired with a 10 m³/h mechanical pump, it achieves an ultimate vacuum of ≤3×10⁻⁵ Pa. Its compact mobile cart, air-cooled design, and high-precision composite vacuum gauge ensure ease of use, low maintenance, and reliable performance in applications such as semiconductor manufacturing, mass spectrometry, vacuum coating, and medical equipment.

Key Features of the TXFJ-300 Ultra-High Vacuum Pumping Unit

  • High-Performance Molecular Pump: Delivers a 300 L/s pumping speed with an ultimate vacuum of ≤3×10⁻⁵ Pa, meeting stringent high-vacuum requirements.
  • Efficient Mechanical Pump: Provides a 10 m³/h pumping speed with an ultimate pressure of ≤0.5 Pa, ensuring reliable operation with minimal maintenance.
  • Air-Cooled Design: Eliminates the need for water cooling, reducing installation complexity and maintenance costs.
  • High-Precision Vacuum Monitoring: Equipped with a composite vacuum gauge (KF40 ionization gauge + KF16 thermocouple gauge) for accurate monitoring across a range of 1×10⁵ to 1×10⁻⁵ Pa.
  • Compact Mobile Design: Features a mobile cart with a ≥100 kg load capacity, ideal for flexible laboratory setups.
  • Customizable Flanges and Valves: Supports DN 100 ISO-K inlet flanges and customizable NW 25/16 KF fittings for seamless integration.
  • Rapid Startup: Achieves operational readiness in 3–5 minutes, enhancing workflow efficiency.
  • Low Vibration: Pump vibration amplitude ≤50 μm, ensuring stable operation in sensitive environments.
  • Built-in Controller: Simplifies operation with an integrated control system for precise pump management.
  • Durable Construction: Stainless steel bellows and robust components ensure long-term reliability and minimal leakage (≤1×10⁻³ Pa/h).

Applications of the TXFJ-300 Ultra-High Vacuum Pumping Unit

  • Semiconductor Manufacturing: Supports high-vacuum requirements for wafer processing and cleanroom environments.
  • Mass Spectrometry: Ensures ultra-low pressures for accurate analytical results in research and industrial labs.
  • Vacuum Coating: Facilitates rapid pumping for optical and industrial coating processes.
  • Medical Equipment: Provides reliable vacuum performance for CT scanners and other precision medical devices.
  • Scientific Research: Meets the stringent vacuum needs of particle accelerators and experimental setups.

Case Studies: Real-World Success with the TXFJ-300

The TXFJ-300 has proven its value across various industries, delivering measurable improvements in efficiency, reliability, and cost savings.

Semiconductor Manufacturing: Boosting Wafer Processing Efficiency (China, 2023)

A leading Chinese semiconductor company required a vacuum system with an ultimate vacuum of ≤5×10⁻⁵ Pa for wafer processing in a space-constrained cleanroom. The TXFJ-300’s 300 L/s pumping speed and compact mobile cart met these needs, achieving 3×10⁻⁵ Pa. The air-cooled design eliminated water-cooling infrastructure, reducing maintenance costs by 15%. The result was a 20% improvement in pumping efficiency and a 10% increase in production yield.

Mass Spectrometry: Enhancing Analytical Precision (Europe, 2022)

A European research institute needed a vacuum system for a mass spectrometer with an ultimate vacuum of ≤1×10⁻⁵ Pa and low leakage rates. The TXFJ-300’s composite vacuum gauge and KF40 angle valve ensured a leakage rate of ≤1×10⁻³ Pa/h, enabling 72-hour stable operation. This improved analysis accuracy by 12% and streamlined operations in a high-precision lab environment.

Vacuum Coating: Accelerating Production (Southeast Asia, 2024)

An optical coating company in Southeast Asia required rapid pumping to 1×10⁻² Pa for their coating process. The TXFJ-300’s air-cooled molecular pump achieved this in under 5 minutes, while the 10 m³/h mechanical pump extended maintenance cycles by 30%. This led to a 25% increase in production efficiency and a 10% reduction in spare parts costs.

Medical Equipment: Simplifying Deployment (USA, 2023)

A U.S. medical device manufacturer needed a portable vacuum solution for CT scanning equipment. The TXFJ-300’s 80 kg mobile cart and 300 L/s pumping speed met high-vacuum requirements, while the air-cooled design simplified installation. Deployment time was reduced by 15%, and operational stability improved by 20%.

Scientific Research: Streamlining Experiments (Japan, 2024)

A Japanese university laboratory required a vacuum system for physical experiments with an ultimate vacuum of ≤3×10⁻⁵ Pa. The TXFJ-300’s composite vacuum gauge and user-friendly interface, combined with the 10 m³/h mechanical pump, enabled rapid pumping and reduced operator training time by 30%. Experimental efficiency increased by 18%.

Technical Specifications

Specification Value
Product Type Ultra-High Vacuum Pumping Unit
Ultimate Vacuum ≤3×10⁻⁵ Pa
Molecular Pump Speed 300 L/s
Mechanical Pump Speed 10 m³/h
Ultimate Pressure (Mechanical Pump) ≤0.5 Pa (TVR10 recommended for ≤0.5 Pa)
Measurement Range (Vacuum Gauge) 1×10⁵ to 1×10⁻⁵ Pa
Startup Time 3–5 minutes
Inlet Flange DN 100 ISO-K (Customizable)
Outlet Flange DN 16/25 ISO-KF (Customizable)
Cooling Method Air-Cooled
Power Supply 220/230V or 380/400V, 50/60 Hz
Test Chamber Size Ø108mm × 80mm
System Weight ≈80 kg
Dimensions (Mobile Cart) Stainless steel, load capacity ≥100 kg
Operating Temperature Range 10–40°C
System Leakage Rate ≤1×10⁻³ Pa/h
Vibration Amplitude ≤50 μm

FAQ: TXFJ-300 Ultra-High Vacuum Pumping Unit

  1. What is the purpose of the TXFJ-300?
    It provides ultra-high vacuum conditions for laboratory and industrial applications like semiconductor manufacturing and mass spectrometry.
  2. What is the ultimate vacuum achievable?
    ≤3×10⁻⁵ Pa, meeting stringent high-vacuum requirements.
  3. Does it require water cooling?
    No, its air-cooled design eliminates the need for water cooling.
  4. How long does it take to start up?
    3–5 minutes, ensuring rapid operational readiness.
  5. What is the pumping speed?
    300 L/s for the molecular pump and 10 m³/h for the mechanical pump.
  6. Is it suitable for mobile applications?
    Yes, its 80 kg mobile cart with ≥100 kg load capacity ensures portability.
  7. Can it be customized?
    Yes, inlet/outlet flanges and valves are customizable to match system requirements.
  8. What industries use the TXFJ-300?
    Semiconductor manufacturing, mass spectrometry, vacuum coating, medical equipment, and scientific research.
  9. How is maintenance handled?
    The air-cooled design and simple structure reduce maintenance frequency and costs.
  10. What is the delivery timeline?
    4–6 weeks to Varna, leveraging efficient logistics via Varna port.

Conclusion: High-Performance Vacuum Solutions for Precision Applications

The TXFJ-300 Ultra-High Vacuum Pumping Unit combines a 300 L/s air-cooled molecular pump, a 10 m³/h mechanical pump, and high-precision vacuum monitoring in a compact, mobile design. Tailored for semiconductor manufacturing, mass spectrometry, vacuum coating, medical equipment, and scientific research, it delivers exceptional performance, low maintenance costs, and rapid deployment. With customizable components and proven reliability, the TXFJ-300 is the ideal choice for achieving ultra-high vacuum in demanding applications.

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The TXFJ-300 Ultra-High Vacuum Pumping Unit delivers a 300 L/s pumping speed and ≤3×10⁻⁵ Pa ultimate vacuum. With an air-cooled molecular pump, compact mobile design, and high-precision vacuum monitoring, it’s ideal for semiconductor, mass spectrometry, and vacuum coating applications.
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