Technical Parameters
Minimum detectable leak rate He4
5.0E-13Pa.m3/s (vacuum)
≤ 5.0E-9Pa.m3/s (inhalation)
Start Time
≤ 3min
Response time
≤ 0.5 s
Molecular pump pumping speed He
2.5L/s ( Hicube 80 )
Backing vacuum pump
pumping speed
dry pump
8L/s;(Iwata 500C/ Agilent TS600);30m³/h
4L/s;(Iwata 250C/ Agilent TS300);15m³/h
oil pump
6L/s;(BAOSI RV24 till);24 m³/h;
Detectable gas
He4 / He3 / H2
Units of measurement
Pa.m3/s 、mbar.l/s 、Torr.l/s 、PPm
source of ion
Yttrium iridium oxide wire (two wires)
Mass spectrometry analysis room
180° non-uniform magnetic deflection mass spectrometry
Calibration leak
Channel type-7mbar.l/s (built-in leak hole)
Communication Interface
RS232/IO
language
Chinese/English/Russian
working environment
Temperature 5~40℃ Humidity ≤80%
Power supply
AC220V± 10
weight
About 115kg
size
974mm*550mm*1026mm