Turbo pump vacuum Impact resistant turbomolecular pumps

TxFB-3600/4000 Turbomolecular pump technical parameters table

Model TXFB - 3600

Inlet flange 400 ISO-K

Exhaust flange 100 ISO-K

Suction rate (L/S)(for air) 3600 4000

Compression ratio N2 >10

8 H2 >6X10

2 ultimate pressure Pa is less than 2 times 10

-6 Rated speed (RPM) 13500 15000

Imported ceramic bearings are used

Vibration value (μm) ≤0.15

Startup time (min) <10

Downtime (min) <20

Recommended front stage pump (L/S) 30-70

Cooling mode Water cooling

Cooling water temperature (℃) ≤20

Cooling water flow (L/min) 1

Pump body baking temperature (℃) <80

Ambient temperature (℃) 5-40

Installation direction ±5° vertical

Pump weight (kg) ≈100